Monolithic integrated system with electrowetting-on-dielectric actuator and film-bulk-acoustic-resonator sensor
Monolithic integrated system with electrowetting-on-dielectric actuator and film-bulk-acoustic-resonator sensor
复制标题
具有电润湿电介质执行器和薄膜体声谐振器传感器的单片集成系统
DOI：
10.1088/0960-1317/25/2/025002
复制
发表时间：
2015
影响因子：
2.3
通讯作者：
Zhang Hao
中科院分区：
文献类型：
--
作者：
Zhang Menglun;Cui Weiwei;Chen Xuejiao;Wang Chao;Pang Wei;Duan Xuexin;Zhang Daihua;Zhang Hao
尽管数字微流体技术在广泛的应用中显示出巨大的潜力，但仍然缺乏具有集成数字液滴致动器和强大的生化传感器的芯片实验室。为了满足这一需求，引入了具有电润湿介质（EWOD）和薄膜体声波谐振器（FBAR）传感器的完全集成芯片，其中EWOD致动器操纵数字液滴，FBAR传感器分别检测液滴中物质的存在。FBAR传感器的压电层和EWOD的介电层共用同一层氮化铝（AlN）薄膜，这是实现两种完全不同的器件完全集成的关键因素。液滴由EWOD致动器可靠地管理，以精确地停留在FBAR传感器上或从FBAR传感器上移开。分别进行了静滴实验和检测限（LOD）实验来表征EWOD致动器和FBAR传感器。利用数字液滴操作，一个“干感测模式”的FBAR传感器在芯片实验室微系统，它有一个更高的信噪比比传统的“湿感测模式”的建议。具有不同浓度的Hg 2+液滴被传输和感测，以展示集成系统的能力。EWOD-FBAR芯片有望在许多复杂的芯片实验室应用中发挥重要作用。
Although digital microfluidics has shown great potential in a wide range of applications, a lab-on-a-chip with integrated digital droplet actuators and powerful biochemical sensors is still lacking. To address the demand, a fully integrated chip with electrowetting-on-dielectric (EWOD) and a film bulk acoustic resonator (FBAR) sensor is introduced, where an EWOD actuator manipulates digital droplets and the FBAR sensor detects the presence of substances in the droplets, respectively. The piezoelectric layer of the FBAR sensor and the dielectric layer of the EWOD share the same aluminum nitride (AlN) thin film, which is a key factor to achieve the full integration of the two completely different devices. The liquid droplets are reliably managed by the EWOD actuator to sit on or move off the FBAR sensor precisely. Sessile drop experiments and limit of detection (LOD) experiments are carried out to characterize the EWOD actuator and the FBAR sensor, respectively. Taking advantage of the digital droplet operation, a ‘dry sensing mode’ of the FBAR sensor in the lab-on-a-chip microsystem is proposed, which has a much higher signal to noise ratio than the conventional ‘wet sensing mode’. Hg2+ droplets with various concentrations are transported and sensed to demonstrate the capability of the integrated system. The EWOD–FBAR chip is expected to play an important role in many complex lab-on-a-chip applications.