Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation
Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation
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DOI：
10.1007/s00340-021-07586-w
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发表时间：
2021-04-01
影响因子：
2.1
通讯作者：
Paulus，G. G.
中科院分区：
文献类型：
--
作者：
Skruszewicz，S.;Fuchs，S.;Paulus，G. G.
我们提出了一个概述，最近的结果与使用极紫外线和软X射线辐射（XCT）的光学相干断层扫描。XCT是一种横截面成像方法，它是光学相干断层扫描（OCT）的衍生物。与通常使用近红外光的OCT相比，XCT利用宽带宽极紫外（XUV）和软X射线（SXR）辐射（Fuchs等人，Sci Rep 6：20658，2016）。与OCT一样，XCT的轴向分辨率仅与光源的相干长度成比例。因此，可以实现低至纳米范围的轴向分辨率。与OCT相比，这是一个高达三个数量级的改进。XCT测量共路径干涉设置中的反射光谱，以检索纳米尺寸样品的轴向结构。该技术已被证明与宽带XUV/SXR辐射从同步加速器设施，最近与紧凑的实验室为基础的激光驱动源。轴向分辨率下降到2.2 nm的实验已经实现。XCT在硅基半导体、光刻掩模和XUV镜和太阳能电池等分层结构的三维成像中具有潜在的应用。
We present an overview of recent results on optical coherence tomography with the use of extreme ultraviolet and soft X-ray radiation (XCT). XCT is a cross-sectional imaging method that has emerged as a derivative of optical coherence tomography (OCT). In contrast to OCT, which typically uses near-infrared light, XCT utilizes broad bandwidth extreme ultraviolet (XUV) and soft X-ray (SXR) radiation (Fuchs et al in Sci Rep 6:20658, 2016). As in OCT, XCT’s axial resolution only scales with the coherence length of the light source. Thus, an axial resolution down to the nanometer range can be achieved. This is an improvement of up to three orders of magnitude in comparison to OCT. XCT measures the reflected spectrum in a common-path interferometric setup to retrieve the axial structure of nanometer-sized samples. The technique has been demonstrated with broad bandwidth XUV/SXR radiation from synchrotron facilities and recently with compact laboratory-based laser-driven sources. Axial resolutions down to 2.2 nm have been achieved experimentally. XCT has potential applications in three-dimensional imaging of silicon-based semiconductors, lithography masks, and layered structures like XUV mirrors and solar cells.