In situ ordering of FEPT thin films by using AG/SI and AG/MN/sub 3/SI/AG/SI templates
In situ ordering of FEPT thin films by using AG/SI and AG/MN/sub 3/SI/AG/SI templates
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DOI：
10.1109/20.908636
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发表时间：
2000-04
期刊：
影响因子：
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通讯作者：
Y. Hsu;Sangki Jeong;D. Lambeth;D. Laughlin
中科院分区：
文献类型：
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作者：
Y. Hsu;Sangki Jeong;D. Lambeth;D. Laughlin
用溅射的方法在Ag/Si和Ag/Mn/Sub3/Si/Ag/Si模板上原位有序制备了FePT薄膜。由于薄膜结构随Ag厚度的变化从岛状结构向连续结构演化，FePT薄膜的有序性和取向均随Ag厚度的变化而变化。连续的[002]Ag薄膜形成较多的L1/sub0/相，c轴垂直于薄膜平面和在薄膜平面内取向，而岛状Ag模板导致较少的L1/sub0/相形成，但在薄膜平面上有择优的c轴取向。另一方面，沉积在Ag/Mn/sub3/Si/Ag/Si模板上的FePT薄膜的c轴垂直于薄膜平面排列。
In situ ordering of FePt thin films by sputtering onto Ag/Si and Ag/Mn/sub 3/Si/Ag/Si templates has been demonstrated. Due to the evolution from island-like to a continuous film structure as a function of Ag thickness, the ordering and orientation of the FePt films both change with Ag thickness. A continuous [002] Ag film results in a greater L1/sub 0/ phase formation with c-axis oriented both perpendicular to and in the film plane while the island-like Ag template results in less L1/sub 0/ phase formation, but a preferential c-axis orientation in the film plane. On the other hand, the FePt films deposited onto the Ag/Mn/sub 3/Si/Ag/Si template have their c axes aligned perpendicular to the film plane.