A micromachined 400 GHz rectangular waveguide and 3-pole bandpass filter on a silicon substrate

A micromachined 400 GHz rectangular waveguide and 3-pole bandpass filter on a silicon substrate
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DOI：
10.1109/mwsym.2004.1339198
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发表时间：
2004-06
期刊：
2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)
影响因子：
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通讯作者：
P. Kirby;D. Pukala;H. Manohara;I. Mehdi;J. Papapolymerou
P. Kirby;D. Pukala;H. Manohara;I. Mehdi;J. Papapolymerou
中科院分区：
其他
文献类型：
--
作者：
P. Kirby;D. Pukala;H. Manohara;I. Mehdi;J. Papapolymerou

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介绍了一种采用分块法制作的400 GHz微机械波导和波导带通滤波器。波导和滤波器是使用深RIE工艺在高电阻率硅上制造的。仿真结果表明，滤波器的插入损耗为0.65 dB，带宽为20 GHz。详细讨论了使用夹具块装配分裂块。
A micromachined 400 GHz waveguide and waveguide bandpass filter using a split block approach is presented. The waveguide and filter are fabricated using a deep RIE process on high resistivity silicon. Simulation results show an insertion loss for the filter of 0.65 dB with a 20 GHz bandwidth. The assembly of the split block using a fixture block is discussed in detail.