Growth of Continuous and Highly (100)-Oriented β-FeSi 2 Films on Si(001) from Si/Fe Multilayers with SiO 2 Capping and Templates
Growth of Continuous and Highly (100)-Oriented β-FeSi 2 Films on Si(001) from Si/Fe Multilayers with SiO 2 Capping and Templates
复制标题
具有 SiO 2 封端和模板的 Si/Fe 多层在 Si(001) 上连续且高度 (100) 取向的 β-FeSi 2 薄膜的生长
DOI：
10.1143/jjap.38.l878
复制
发表时间：
1999
影响因子：
1.5
通讯作者：
F. Hasegawa
中科院分区：
文献类型：
--
作者：
T. Suemasu;N. Hiroi;T. Fujii;K. Takakura;F. Hasegawa
通过对Si/Fe多层膜进行退火处理，在Si（001）衬底上制备了连续的、高度（100）取向的β-FeSi_2薄膜。为了获得高质量的β-FeSi 2，退火温度必须高于800°C，但由于退火，β-FeSi 2聚集成岛状。在Si/Fe多层膜的顶部沉积SiO2覆盖层可以防止这种聚集，但所得β-FeSi 2膜显示出多晶性质。在（100）取向的β-FeSi_2模板上制备了Si/Fe多层膜，并用SiO_2作为覆盖层，得到了高度（100）取向的连续β-FeSi_2薄膜。
We fabricated continuous and highly (100)-oriented β-FeSi2 films on Si(001) by annealing Si/Fe multilayers. An annealing temperature above 800°C was necessary to obtain high-quality β-FeSi2, but the β-FeSi2 aggregated into islands due to the annealing. Such aggregation was prevented by a SiO2 capping layer deposited on the top of the Si/Fe multilayers, but the obtained β-FeSi2 film showed a polycrystalline nature. Highly (100)-oriented continuous β-FeSi2 film was obtained using Si/Fe multilayers on a (100)-oriented β-FeSi2 template, together with a SiO2 capping layer.