Self-heated hollow cathode discharge system for charged particle sources and plasma generators.

Self-heated hollow cathode discharge system for charged particle sources and plasma generators.
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DOI：
10.1063/1.3258033
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发表时间：
2010-02
期刊：
The Review of scientific instruments
影响因子：
--
通讯作者：
V. Gushenets;A. Bugaev;E. Oks;P. M. Schanin;A. Goncharov
V. Gushenets;A. Bugaev;E. Oks;P. M. Schanin;A. Goncharov
中科院分区：
其他
文献类型：
--
作者：
V. Gushenets;A. Bugaev;E. Oks;P. M. Schanin;A. Goncharov

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本文介绍了使用自热空心阴极的放电系统新设计的实验研究结果。该放电系统具有某些优点，对于高剂量离子注入、等离子体发生器和等离子体电子源的使用具有吸引力。
This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.