Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping
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DOI：
10.1109/jmems.2022.3187428
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发表时间：
2022-07-29
影响因子：
2.7
通讯作者：
Mita, Yoshio
中科院分区：
文献类型：
--
作者：
Yamaguchi, Takafumi;Usami, Naoto;Mita, Yoshio
我们提出了一种能够同时进行机械处理和电气测量的自变形柔性镊子。该镊子为软悬臂，尺寸为2mm × 8mm × 75-100 μ m，具有自变形特性。该设备被证明能够通过轻轻触摸表面并抓住一个球形头来成功地检测电信号。该装置具有最低的工作电压（1.5 V-DC），适合软夹持的力，曲率半径为2mm，与同类先进设备相比，这是最小的值之一。该装置采用一种独特且高度可靠的工艺制造，该工艺专门用于用新型离子聚合物-金属复合材料（IPMCs）生产柔性悬臂。使用的材料是聚偏氟乙烯-共三氟乙烯（PVDF-TrFE）和离子液体（IL）。以丙酮为溶剂制备PVDF-TrFE/IL凝胶，并在凝胶表面包裹银纳米线作为电极。在1.5 V-DC下，长度为8mm，含50wt % IL的致动器产生的最大弯曲位移为7mm，最小曲率半径为2mm。
We present a self-deformable flexible tweezer capable of simultaneous mechanical handling and electrical measurements. The tweezer has a soft cantilever with the dimensions 2 mm x 8 mm x 75-100 mu m, and undergoes self-deformation. The device is shown to be successfully capable of detecting electrical signals by gently touching the surface and grasping a spherical bead. The device demonstrated the lowest working voltage (1.5 V-DC), force suitable for soft gripping, and curvature radius of 2 mm, that was one of the smallest values compared to that of similar state-of-the-art devices. The device was fabricated using a unique and highly reliable process that was specifically developed to produce flexible cantilevers with novel ionic polymer-metal composites (IPMCs). The materials used were poly(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) and an ionic liquid (IL). The PVDF-TrFE/IL gel was prepared using acetone as the solvent and the gel was coated with silver nanowires as the electrodes. The actuator with a length of 8 mm and containing 50 wt% IL yielded the largest bending displacement of 7 mm and minimum curvature radius of 2 mm at 1.5 V-DC.