Development of a dielectric barrier discharge (DBD) cryo-microplasma: generation and diagnostics
Development of a dielectric barrier discharge (DBD) cryo-microplasma: generation and diagnostics
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DOI：
10.1088/0963-0252/17/3/035008
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发表时间：
2008-05
影响因子：
3.8
通讯作者：
D. Ishihara;Y. Noma;S. Stauss;Masaki Sai;T. Tomai;K. Terashima
中科院分区：
文献类型：
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作者：
D. Ishihara;Y. Noma;S. Stauss;Masaki Sai;T. Tomai;K. Terashima
我们研制了一种低温微等离子体，可以将气体温度连续控制在室温和水的冰点以下。为了研制低温微等离子体，我们首先研制了一种能够抑制其气体温度升高的常压低温微等离子体。使用了在露天产生的氦气。平均估算的电子密度和温度分别为108-109 cm−-3和4-5 eV，与外加电压无关。然后，作为常压低温微等离子体的工作气体的氦气在露天条件下被液氮冷却，产生常压低温微等离子体。我们用光学发射光谱观察到产生等离子体的石英管周围结霜和原子氧发射的增加。最后，为了避免霜冻的产生，在与露天隔开的反应堆室内产生了低温微等离子体。采用氦气、氮气和氧气作为工作气体。利用热电偶和氮气转动温度的估算，我们验证了低温微等离子体的气体温度(Tg≈180-300K)远低于常规常压低温等离子体的气体温度(300K以上)。
We developed a cryo-microplasma, which can continuously control gas temperature below room temperature and below the freezing point of water. To develop the cryo-microplasma, we first developed an atmospheric-pressure low-temperature microplasma that can suppress the increase in its gas temperature. Helium gas was employed, which was generated in open air. The average estimated electron density and temperature were 108–109 cm−3 and 4–5 eV, respectively, independent of the applied voltage. Then, helium gas, which was the working gas of the atmospheric-pressure low-temperature microplasma, was cooled by liquid nitrogen to generate an atmospheric-pressure cryo-microplasma in open air. We observed the generation of frost around the quartz tube in which the plasma was generated and an increase in atomic oxygen emission by optical emission spectroscopy. Finally, to avoid the generation of frost, a cryo-microplasma was generated in a reactor chamber separated from open air. Helium, nitrogen and oxygen were employed as working gases. Using thermocouples and by estimation from the nitrogen rotational temperature, we verified that the gas temperature of the cryo-microplasma was much lower (Tg ≈ 180–300 K) than that of the conventional atmospheric-pressure low-temperature plasma (above 300 K).