Shape memory microactuators
Shape memory microactuators
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DOI：
10.1007/s005420000082
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发表时间：
2001-11
期刊：
影响因子：
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通讯作者：
S. Büttgenbach;S. Bütefisch;M. Leester-Schädel;A. Wogersien
中科院分区：
文献类型：
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作者：
S. Büttgenbach;S. Bütefisch;M. Leester-Schädel;A. Wogersien
由于形状记忆合金是一种智能材料，基于形状记忆效应的致动元件越来越多地应用于各个领域。本文报道了几种由形状记忆元件驱动的硅微执行器的设计和制造，即机械微钳、微阀和人工肌肉执行器。执行器采用柔性机构设计，并采用硅微加工技术制作。对于形状记忆元件的加工，采用了一种新的激光辅助加工技术。形状记忆元件通过正连接或粘接的方式连接到硅机构上。
Since shape memory alloys have been recognized to be a smart material, actuator elements based on the shape memory effect have been increasingly used in various fields of application. This paper reports on the design and fabrication of several silicon microactuators driven by shape memory elements, namely mechanical microgrippers, microvalves and artificial muscle actuators. The actuators were designed as compliant mechanisms and fabricated by silicon micromachining. For the processing of the shape memory elements a new laser assisted technology was applied. The shape memory elements were connected to the silicon mechanisms either by positive joining or by adhesive bonding.