Theoretical and experimental limits of quantitative analysis of strain and chemistry of inGasAs/GaAs layers using (200) dark-fiel TEM imaging

Theoretical and experimental limits of quantitative analysis of strain and chemistry of inGasAs/GaAs layers using (200) dark-fiel TEM imaging
复制标题

使用 (200) 暗场 TEM 成像对 inGasAs/GaAs 层的应变和化学进行定量分析的理论和实验极限

DOI:
--
复制
发表时间:
2003
期刊:
影响因子:
--
通讯作者:
K. Leifer
K. Leifer
中科院分区:
--
文献类型:
--
作者:
J. Cagnon;P. Buffat;P. Stadelmann;K. Leifer

文献摘要

被引文献

相似文献