T.Yamaguchi, Y.Kaneko, A.H.Jayatissa M.Aoyama: "Thickness change in an annealed amorphous silicon film detected by spectroscopic ellipsometry" Thin Solid Films. (Accepted for publication).
T.Yamaguchi, Y.Kaneko, A.H.Jayatissa M.Aoyama: "Thickness change in an annealed amorphous silicon film detected by spectroscopic ellipsometry" Thin Solid Films. (Accepted for publication).
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T.Yamaguchi、Y.Kaneko、A.H.Jayatissa M.Aoyama:“通过光谱椭圆光度法检测退火非晶硅薄膜的厚度变化”固体薄膜。
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