Nanometer-order thermal deformation measurement by a calibrated phase-shifting digital holography system
Nanometer-order thermal deformation measurement by a calibrated phase-shifting digital holography system
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DOI：
10.1364/oe.26.012594
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发表时间：
2018-05-14
期刊：
影响因子：
3.8
通讯作者：
Tsuda, Hiroshi
中科院分区：
文献类型：
--
作者：
Xia, Peng;Ri, Shien;Tsuda, Hiroshi
提出了一种基于标定相移数字全息的热变形测量系统。标定的相移数字全息系统采用两台同步的普通CMOS相机。一种是记录包含物体信息的全息图，另一种是记录干涉条纹以评估相移误差。标定后的相移数字全息术可以提供高质量的再现像，用于计算物体的热变形。同时，通过热成像仪记录了物体在不同温度下的热图像。在真实的实验中实现了电子器件纳米级热变形的测量。该系统可用于电子封装材料的开发或系统设计。(C)根据OSA开放获取出版协议的条款，2018年美国光学学会
A thermal deformation measurement system based on calibrated phase-shifting digital holography is proposed. Two synchronized ordinary CMOS cameras are used in the calibrated phase-shifting digital holography system. One is to record the holograms including the object information, and the other is to record the interference fringes to evaluate phase-shifting errors. The calibrated phase-shifting digital holography can provide the high quality reconstructed images which are applied to calculate the thermal deformation of the object. Meanwhile, the thermal images of the object at different temperatures are recorded by a thermal camera. Nanometer-order thermal deformation measurement of an electronic device is achieved in a real experiment. Our measurement system could be useful for electric packaging materials development or the system design. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement