Transfer Printing of Nanoplasmonic Devices onto Flexible Polymer Substrates from a Rigid Stamp
Transfer Printing of Nanoplasmonic Devices onto Flexible Polymer Substrates from a Rigid Stamp
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DOI：
10.1007/s11468-012-9370-4
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发表时间：
2012-12-01
期刊：
影响因子：
3
通讯作者：
Cumming, D. R. S.
中科院分区：
文献类型：
--
作者：
Chen, Q.;Martin, C.;Cumming, D. R. S.
使用纳米转移印刷技术制造等离子体滤色器和偏振器，其中将铝纳米结构从金属涂覆的硅印模直接转移到一块聚碳酸酯（PC）片材上。使用10巴的中等压力和120 A摄氏度的温度，成功地印刷了10 X 12 mm的面积，最小特征尺寸为75 nm。硅印模结构的轻微底切有助于将顶部金属与侧壁上的金属分离，并大大提高了印刷质量。印刷到PC基板上的金属膜显示出比直接蒸发到硅印模上的金属膜更光滑的表面。使用这种快速且廉价的技术制造的等离子体滤色器表现出与使用电子束光刻和干法蚀刻工艺制造的器件类似的功能。滤波器和线栅偏振器的实验结果与模拟结果吻合良好。
Plasmonic colour filters and polarizers were fabricated using a nanotransfer printing technique, where aluminium nanostructures were directly transferred from a metal coated silicon stamp on to a piece of polycarbonate (PC) sheet. Using a moderate pressure of 10 bar and a temperature of 120 A degrees C, an area of 10 x 12 mm was successfully printed, with a minimum feature size of 75 nm. Slight undercutting of the silicon stamp structure helped to separate the top metal from that on the sidewalls and to greatly improve the printing quality. The metal film printed on to the PC substrate showed a smoother surface than those directly evaporated onto the silicon stamp. The plasmonic colour filters fabricated using this fast and inexpensive technique demonstrated similar functionalities to devices fabricated using electron beam lithography and dry etch processing. Experimental results for filters and wire grid polarizers were in good agreement with simulations.