Low temperature iron gettering by grown-in defects in p-type Czochralski silicon
Low temperature iron gettering by grown-in defects in p-type Czochralski silicon
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DOI:
10.1016/j.spmi.2016.03.006
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发表时间:
2016-11
影响因子:
3.1
通讯作者:
Haiyan Zhu;Xuegong Yu;Xiaodong Zhu;Yichao Wu;Jian He;J. Vanhellemont;Deren Yang
中科院分区:
文献类型:
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作者:
Haiyan Zhu;Xuegong Yu;Xiaodong Zhu;Yichao Wu;Jian He;J. Vanhellemont;Deren Yang