Three-dimensional STEM for observing nanostructures.
Three-dimensional STEM for observing nanostructures.
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用于观察纳米结构的三维 STEM。
DOI：
10.1093/jmicro/50.3.235
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
M. Iwaki
中科院分区：
文献类型：
--
作者：
M. Koguchi;H. Kakibayashi;R. Tsuneta;M. Yamaoka;T. Niino;N. Tanaka;K. Kase;M. Iwaki
为了对纳米结构进行三维(3D)观察，研制了一种新型的扫描电子显微镜。利用双球面支点，实现了精确的恒心旋转。采用聚焦离子束微采样技术制备了用于三维观察的圆柱形样品。用3D-STEM从不同的方向观察了半导体存储器件的铜通孔和氧化锌颗粒，并成功地以地形模式重建了氧化锌颗粒的三维数据。
A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode.