Approaching ultrathin VO2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching
Approaching ultrathin VO2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching
复制标题
通过偏置反应溅射在蓝宝石 (001) 衬底上制备超薄 VO2 薄膜：特征形貌及其对红外光切换的影响
DOI：
10.1116/6.0001023
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发表时间：
2021
期刊：
影响因子：
--
通讯作者：
Uehara Yoichi
中科院分区：
文献类型：
--
作者：
Okimura Kunio;Sakai Joe;Kuwahara Masashi;Zaghrioui Mustapha;Uehara Yoichi
