Refractive index & physical thickness distributions measurement and consideration of dependence of measurement accuracy on scanning interval using low-coherence digital holography
Refractive index & physical thickness distributions measurement and consideration of dependence of measurement accuracy on scanning interval using low-coherence digital holography
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DOI：
10.1109/sii.2013.6776608
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发表时间：
2013-12
期刊：
影响因子：
--
通讯作者：
Kaho Watanabe;T. Nomura
中科院分区：
文献类型：
--
作者：
Kaho Watanabe;T. Nomura
提出了利用低相干光源的数字全息术测量折射率分布和物理厚度分布的方法。基准面的引入使得能够同时测量折射率和物理厚度分布。通过光学实验，证实了该方法的可行性。为了缩短测量时间，还讨论了参考镜步进间隔与测量结果的关系。
The measurement method of a refractive index distribution and a physical thickness distribution using digital holography with a low-coherent light source is proposed. The introduction of a datum plane enables the simultaneous measurement of a refractive index and a physical thickness distributions. By the optical experiments, the potential of the proposed method is confirmed. For the reduction of measurement time, the relation between stepping intervals of a reference mirror and measurement results are also discussed.