J.Noh et al.: "Contact Resistivity between W and Heavily Doped Si_<1-x-y>Ge_xC_y Epitaxial Film"2nd Int.Workshop on New Group IV (Si-Ge-C) Semiconductors. Abs.No.VI-07 (2002)
J.Noh et al.: "Contact Resistivity between W and Heavily Doped Si_<1-x-y>Ge_xC_y Epitaxial Film"2nd Int.Workshop on New Group IV (Si-Ge-C) Semiconductors. Abs.No.VI-07 (2002)
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J.Noh 等人:“W 与重掺杂 Si_<1-x-y>Ge_xC_y 外延膜之间的接触电阻率”第二届新型 IV 族 (Si-Ge-C) 半导体国际研讨会。
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