Junji SHIBATA, M.OTA, A.ODA: "A basic study on CMP mechanism and a trial to produce CMP slurry by sol-gel method"7^<th> International Symposium on Abrasives in Abrasive Technology. ISAAT 2004-XX(予定). (2004)
Junji SHIBATA, M.OTA, A.ODA: "A basic study on CMP mechanism and a trial to produce CMP slurry by sol-gel method"7^<th> International Symposium on Abrasives in Abrasive Technology. ISAAT 2004-XX(予定). (2004)
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Junji Shibata,M.OTA,A.ODA:“CMP机理的基础研究和溶胶-凝胶法生产CMP浆料的试验”第7届国际磨料技术研讨会ISAAT 2004-XX(计划中) ))(2004)。
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