Effect of stress on optical band gap of ZnO thin films with substrate temperature by spray pyrolysis
Effect of stress on optical band gap of ZnO thin films with substrate temperature by spray pyrolysis
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DOI：
10.1016/j.jallcom.2009.05.116
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发表时间：
2009-10-19
影响因子：
6.2
通讯作者：
Ashok, M.
中科院分区：
文献类型：
--
作者：
Rao, T. Prasada;Kumar, M. C. Santhosh;Ashok, M.
采用喷雾热解法在玻璃衬底上制备了不同衬底温度的氧化锌薄膜。研究了衬底温度对薄膜晶化行为和光学性能的影响。用X射线衍射研究了玻璃基片上ZnO薄膜的应变和应力效应的演化。在较低的基片温度下沉积的ZnO薄膜具有较大的压应力，压应力为1.77GPa。当衬底温度增加到450 ℃时，其弛豫到1.47GPa。研究了薄膜的光学参数，如光学透射率、反射率、介电常数、折射率和能带隙随衬底温度的变化。所有薄膜在可见光区的透射率约为85%。发现膜中的压应力导致光学带隙的减小。(C)2009爱思唯尔B V保留所有权利。
Zinc oxide (ZnO) thin films have been deposited with various substrate temperatures by spray pyrolysis method onto glass substrates. The effects of substrate temperature on the crystallization behavior and optical properties of the films have been studied. The evolution of strain and stress effects in ZnO thin films on glass substrate has been studied using X-ray diffraction The films deposited at low substrate temperature have large compressive stress of 1.77 GPa. which relaxed to 1.47 GPa as the substrate temperature increased to 450 degrees C. Optical parameters such as optical transmittance, reflectance, dielectric constant, refractive index and energy band gap have been studied and discussed with respect to substrate temperature All films exhibit a transmittance of about 85% in the visible region. it was found that the compressive stress in the films causes a decrease in the optical band gap. (C) 2009 Elsevier B V All rights reserved.