TEM analysis of structure change in 4H-SiC surface irradiated by femtosecond laser pulses
TEM analysis of structure change in 4H-SiC surface irradiated by femtosecond laser pulses
复制标题
飞秒激光脉冲辐照下 4H-SiC 表面结构变化的 TEM 分析
DOI:
--
复制
发表时间:
2007
期刊:
影响因子:
--
通讯作者:
et. al.
中科院分区:
文献类型:
--
作者:
H;Kawahara;et. al.