TEM analysis of structure change in 4H-SiC surface irradiated by femtosecond laser pulses

TEM analysis of structure change in 4H-SiC surface irradiated by femtosecond laser pulses
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飞秒激光脉冲辐照下 4H-SiC 表面结构变化的 TEM 分析

DOI:
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发表时间:
2007
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通讯作者:
et. al.
et. al.
中科院分区:
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文献类型:
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作者:
H;Kawahara;et. al.

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