Precise contour following for biaxial systems via an A-type iterative learning cross-coupled control algorithm

Precise contour following for biaxial systems via an A-type iterative learning cross-coupled control algorithm
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DOI:
10.1016/j.ijmachtools.2015.03.005
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发表时间:
2015-06
影响因子:
14
通讯作者:
Jianhua Wu;Chao-yuan Liu;Z. Xiong;H. Ding
Jianhua Wu;Chao-yuan Liu;Z. Xiong;H. Ding
中科院分区:
工程技术1区
文献类型:
--
作者:
Jianhua Wu;Chao-yuan Liu;Z. Xiong;H. Ding

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提出了一种双轴系统的A型迭代学习交叉耦合控制算法。基于代数方程的轮廓误差模型被用作CCC的输入。这个模型的优点是,当且仅当实际价值为零时,它才为零。迭代学习CCC的设计目的是使其输入收敛到零。因此,预计轮廓误差也将收敛到零。分析了控制算法在频域的收敛条件,并在运动平台上实现了该方法。实验结果表明,无论跟踪误差是大是小,该算法在周期逼近无穷大时都能很好地跟踪轮廓。
This paper proposes an A-type iterative learning cross-coupled control (CCC) algorithm for biaxial systems. An algebraic equation based contour error model is used as the CCC input. This model has the advantage that it is zero if and only if the real value vanishes. The iterative learning CCC is designed to make its input converge to zero. Hence, it is expected to that the contour error will converge to zero as well. After analyzing the control algorithm convergence condition in the frequency domain, the proposed method is implemented on a motion stage. Experimental results show that the algorithm perfectly follows contours as the cycles approach infinity regardless of whether tracking errors are small or large.