Optical and photoconductive properties of discharge‐produced amorphous silicon
Optical and photoconductive properties of discharge‐produced amorphous silicon
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放电产生的非晶硅的光学和光电导特性
DOI:
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发表时间:
1977
期刊:
影响因子:
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通讯作者:
D. Carlson
中科院分区:
文献类型:
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作者:
P. Zanzucchi;C. Wronski;D. Carlson
Optical and photoconductive properties of discharge‐produced amorphous silicon (a‐Si) of the type used in efficient thin‐film solar cells have been studied as a function of a wide range of deposition conditions. The optical absorption, optical band gap, photoconductivity, hydrogen content, and the characteristics of the Si‐H vibrational mode in a‐Si were determined. Both substrate temperature in the range ∼200–400 °C and the type of discharge used are found to be important factors in determining the measured optical and photoconductive properties of a‐Si. For films produced at substrate temperatures near 200 °C, dihydride bonding occurs, and the optical band gap is about 1.7 eV. As the substrate temerature increases, monohydride bonding is favored, the optical band gap decreases, the optical absorption increases, and the photoconductive properties improve. These properties are, in part, associated with the presence of bonded hydrogen. For substrate temperatures between 300 and 400 °C, the photoconductive ...