High-speed focal-distance-modulated fiber-coupled confocal sensor for coordinate measuring systems.
High-speed focal-distance-modulated fiber-coupled confocal sensor for coordinate measuring systems.
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DOI：
10.1364/ao.57.003907
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发表时间：
2018-05
期刊：
影响因子：
1.9
通讯作者：
T. Hausotte;A. Gröschl;Janik Schaude
中科院分区：
文献类型：
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作者：
T. Hausotte;A. Gröschl;Janik Schaude
提出了一种用于坐标测量系统(CMSS)探测的新型高精度、高精度、高精度的高频调焦共焦传感器。该传感器在保持共焦测量原理已知优势的同时，创新地结合了光纤耦合的共焦照明和检测、可调谐的声驱梯度折射率流体透镜来调制焦距，以及利用锁定放大器进行的新颖信号处理。对于扫描采样模式下CMS的最优反馈控制，新的结构能够获得近似线性的特性曲线。本文重点介绍了该装置的光学应用和信号处理。
This article presents a new robust, precise, high-frequency focal-distance-modulated confocal point sensor for probing in coordinate measuring systems (CMSs). While maintaining the known advantages of the confocal measurement principle, the sensor represents an innovative combination of a fiber-coupled confocal illumination and detection with a tuneable, acoustically driven gradient-index fluid lens for modulation of the focus distance and a novel signal processing utilizing a lock-in amplifier. The new arrangement is able to achieve an approximately linear characteristic curve for the optimized feedback control of the CMS in scanning sample mode. This article emphasizes the optical application and the signal processing of the setup.