Preparation and characterization of the ZnO:Al/Fe65Co35/ZnO:Al multifunctional films
Preparation and characterization of the ZnO:Al/Fe65Co35/ZnO:Al multifunctional films
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DOI：
10.1007/s00339-011-6679-3
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发表时间：
2012-03
期刊：
影响因子：
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通讯作者：
L. Wang;S. J. Liu;H. Guo;Yuxiang Chen;G. Yue;D. Peng;T. Hihara;K. Sumiyama
中科院分区：
文献类型：
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作者：
L. Wang;S. J. Liu;H. Guo;Yuxiang Chen;G. Yue;D. Peng;T. Hihara;K. Sumiyama
该铁磁性透明导电薄膜是一种同时具有高可见光透过率、低电阻率和室温铁磁性的多功能薄膜。本文采用磁控溅射法在ZnO：Al基体中插入中间磁性层Fe_（65）Co_（35），在室温~ 400 ℃的衬底温度范围内制备了ZnO：Al/Fe_（65）Co_（35）/ZnO：Al铁磁透明导电多层膜。薄膜总厚度约为400 nm，中间为4 nm的Fe 65 Co 35合金层。系统研究了衬底温度对多层膜结构、电学、光学和磁学性能的影响。结果表明，基片温度对复合多层膜的结构和性能有很大的影响。结果还表明，中间插入的Fe_（65）Co_（35）合金薄层对提供多层膜的RT铁磁性和降低多层膜的电阻率起着重要作用。因此，可以获得具有良好的光学透明性、高导电性和RT铁磁性的组合的多功能膜材料。
The ferromagnetic transparent conducting film is a multifunctional film which has high visible transmittance, low resistivity and room-temperature ferromagnetism, simultaneously. In this article, ferromagnetic transparent conducting ZnO:Al/Fe65Co35/ZnO:Al multilayer films were fabricated by inserting a middle magnetic Fe65Co35layer into aluminum-doped zinc oxide (ZnO:Al) matrix using a magnetron sputtering apparatus at substrate temperature ranging from room temperature (RT) to 400∘C. The total film thickness was about 400 nm and the middle Fe65Co35alloy layer was 4 nm. The influences of substrate temperature (Ts) on the structural, electrical, optical and magnetic properties of the multilayer films were systemically investigated. The results showed that the microstructure and performance of the composite multilayer films strongly depended on the substrate temperature. The present results also showed that the inserted middle Fe65Co35alloy thin layer played an important role in providing theRTferromagnetism and decreasing the resistivity of the multilayer films. Therefore, it is possible to obtain a multifunctional film material with the combination of good optical transparency, high electrical conductivity andRTferromagnetism.