Controllable Synthesis of Ordered ZnO Nanodots Arrays by Nanosphere Lithography
Controllable Synthesis of Ordered ZnO Nanodots Arrays by Nanosphere Lithography
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DOI：
10.1021/cg701277f
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发表时间：
2008-07
影响因子：
3.8
通讯作者：
Lingxiang Chen;Jingyun Huang;Z. Ye;Haiping He;Yujia Zeng;Shuang‐Peng Wang;Huizhen Wu
中科院分区：
文献类型：
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作者：
Lingxiang Chen;Jingyun Huang;Z. Ye;Haiping He;Yujia Zeng;Shuang‐Peng Wang;Huizhen Wu
采用聚苯乙烯纳米球光刻技术，在室温下制备了有序可控的六角形图案氧化锌纳米点。首先，形成聚苯乙烯微球的自组装单层作为掩膜。然后用电子束蒸发的方法通过掩模沉积氧化锌。聚苯乙烯微球被刻蚀后，在衬底上形成了有序的氧化锌纳米点阵列。得到的氧化锌纳米点具有较高的化学纯度和择优的c轴择优取向，质量可以接受。光致发光测量表明，由低维量子特性引起的自由激子发射发生了蓝移。纳米点的大小可以通过改变沉积时间来控制。生长时间分别为1、2和3min的氧化锌纳米点在3.378、3.356和3.314 eV处表现出不同的自由激子发射。因此，这是一种精确控制点的大小和几何形状的技术，在纳米级光电子器件中有很大的应用前景。
Controllable ordered hexagonally patterned ZnO nanodots were achieved by polystyrene nanosphere lithography at room temperature. First a self-assembled monolayer of polystyrene spheres was formed as a mask. Then ZnO was deposited through the mask by e-beam vaporization. After the polystyrene spheres were etched away, ordered ZnO nanodots arrays were formed on the substrate. The obtained ZnO nanodots are of acceptable quality with high chemical purity and preferential c-axis orientation. A photoluminescence measurement shows a blue shift in free-exciton emission derived from low-dimensional quantum characteristics. The size of the nanodots can be controlled by varying the deposition time. The ZnO nanodots with growth times of 1, 2, and 3 min exhibit different free-exciton emission at 3.378, 3.356, and 3.314 eV. Therefore this is a technique with precise control of the size and geometry of the dots, which has a great promise for applications in nanoscale optoelectronic devices.