An In2O3 nanowire-like network fabricated on coplanar sensor surface by sacrificial CNTs for enhanced gas sensing performance
An In2O3 nanowire-like network fabricated on coplanar sensor surface by sacrificial CNTs for enhanced gas sensing performance
复制标题
通过牺牲 CNT 在共面传感器表面上制造 In2O3 纳米线状网络，以增强气体传感性能
DOI：
10.1016/j.snb.2013.05.007
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发表时间：
2013-08
期刊：
影响因子：
--
通讯作者：
Xie, Changsheng
中科院分区：
文献类型：
--
作者：
Zeng, Dawen;Xu, Keng;Zhang, Shunping;Xie, Changsheng
金属氧化物准一维纳米结构由于具有较大的比表面积和较少团聚的多孔结构，具有很好的气敏性能。然而，设计良好的脆弱纳米结构在传统的气体传感器制造过程中容易被破坏。本文提出了一种新型的材料-传感器集成制造策略：在丝网印刷（SP）技术和煅烧技术的基础上，将微注入（MI）技术引入到传感器的制造过程中，即SPMIC，通过牺牲碳纳米管（CNTs）的结构复制，直接在共面传感器阵列表面获得in2o3纳米线状网络。在300℃下，对100ppm甲醛的响应（电阻比Ra/Rg）为63.5，是致密in2o3纳米颗粒膜（非网状膜）的30倍左右。气敏性能的增强主要归因于材料的高表面体积比和纳米级结构性能。此外，SPMIC不仅可以用于制备其他金属氧化物纳米线状网络，还可以用于在所需位置用不同材料制备共面气体传感器阵列。
Metal oxide quasi-one-dimensional (quasi-1D) nanostructures have a very good gas-sensing performance due to their large surface area and porous structures with a less agglomerated configuration. However, the well-designed fragile nanostructures could be easily destroyed during the conventional fabrication process of gas sensors. Herein, we presented a novel materials-sensor integration fabrication strategy: on basis of screen printing (SP) technology and calcination, micro-injecting (MI) was introduced into the fabrication process of sensors, which was named as SPMIC, to obtain In2O3nanowire-like network directly on the surface of coplanar sensors array by structure replication from sacrificial carbon nanotubes (CNTs). The obtained In2O3nanowire-like network exhibited an excellent response (electrical resistance ratio Ra/Rg), about 63.5, for100ppm formaldehyde at 300°C, which was about 30 times larger than that of compact In2O3nanoparticles film (non-network film). The enhanced gas-sensing properties were mainly attributed to the high surface-to-volume ratio and the nanoscopic structural properties of materials. Furthermore, the SPMIC could be employed not only in the preparation of other metal oxide nanowire-like network, but also in the fabrication of coplanar gas sensors arrays on the required sites with different materials.
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影响因子：
10.9
作者：
Cheng Peng-peng;大连 大连理工大学电子科学与技术学院;Wang Jing;Yao Peng-jun;Du Hai-Ying;Li Xiao-gan;沈阳 沈阳师范大学教育技术学院-沈阳-沈阳师范大学教育
通讯作者：
Cheng Peng-peng;大连 大连理工大学电子科学与技术学院;Wang Jing;Yao Peng-jun;Du Hai-Ying;Li Xiao-gan;沈阳 沈阳师范大学教育技术学院-沈阳-沈阳师范大学教育
影响因子：
17.1
作者：
Z. Zanolli;R. Leghrib;A. Felten;J. Pireaux;E. Llobet;J. Charlier
通讯作者：
Z. Zanolli;R. Leghrib;A. Felten;J. Pireaux;E. Llobet;J. Charlier
影响因子：
2.1
作者：
Yan-li Liu;Haifeng Yang;Yu Yang;Zhi-min Liu;G. Shen;R. Yu
通讯作者：
Yan-li Liu;Haifeng Yang;Yu Yang;Zhi-min Liu;G. Shen;R. Yu
影响因子：
--
作者：
N. Hoa;N. Quy;M. An;Hyejin Song;Youngjin Kang;Yousuk Cho;Dojin Kim
通讯作者：
N. Hoa;N. Quy;M. An;Hyejin Song;Youngjin Kang;Yousuk Cho;Dojin Kim
影响因子：
8.6
作者：
Huang, J;Matsunaga, N;Kunitake, T
通讯作者：
Kunitake, T