Surface roughness evaluation via ultrasonic scanning
Surface roughness evaluation via ultrasonic scanning
复制标题
通过超声波扫描评估表面粗糙度
DOI：
10.1109/58.330267
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发表时间：
1993
期刊：
影响因子：
--
通讯作者：
E. S. Furgason
中科院分区：
文献类型：
--
作者：
Sung Jun Oh;Yung C. Shin;E. S. Furgason
尽管超声波广泛应用于各种材料的无损检测和评估，但由于表面粗糙度引起的聚焦超声波散射尚未得到充分研究。本文提出了一种分析和实验评价表面粗糙度测量聚焦超声束。以正弦调制高斯脉冲为源，采用脉冲响应法分析了聚焦超声波的特性。首先，对聚焦超声换能器焦平面内的波束轮廓进行了数值分析和实验研究。第二，峰值振幅分布和反射波形从一个平坦的表面与不同的入射角的解析生成和与实验结果进行比较。然后，超声波反射的峰值振幅的尖形表面中容易发现的加工表面进行了分析，并与实验数据进行了比较。分析表明，分析和实验结果之间的良好协议。使用轮廓仪和建议的超声波系统的测量之间的良好的相关性表明，通过超声波传感的表面粗糙度测量的良好潜力。<<ETX>>
Despite extensive applications of ultrasonic waves to various nondestructive testing and evaluation of materials, scattering of focused ultrasonic waves due to surface roughness has not been fully investigated. This paper presents an analytical and experimental evaluation of surface roughness measurement using focused ultrasonic beams. The characteristics of focused ultrasonic waves are analyzed by using the impulse response method with a sine-modulated Gaussian pulse as source. First, the beam profile in the focal plane of the focused ultrasonic transducer is analyzed both numerically and experimentally. Second, peak amplitude distribution and reflected waveforms from a flat surface with various incident angles are analytically generated and compared with experimental results. Then, the peak amplitudes of the ultrasonic waves reflected from cusped surfaces which are easily found among machined surfaces are analyzed and compared with experimental data for the first time. The analysis shows good agreement between analytical and experimental results. The excellent correlation between the measurements using a profilometer and the proposed ultrasonic system demonstrates a good potential for surface roughness measurement by ultrasonic sensing.<<ETX>>