Three dimensional micromachining on aluminum surface by electrochemical wet stamping technique
Three dimensional micromachining on aluminum surface by electrochemical wet stamping technique
复制标题
电化学湿冲压技术对铝表面进行三维微加工
DOI：
10.1016/j.elecom.2013.04.031
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发表时间：
2013-08-01
影响因子：
5.4
通讯作者：
Zhan, Dongping
中科院分区：
文献类型：
--
作者：
Jiang, Li-Min;Du, Yu-Jie;Zhan, Dongping
提出了一种用于铝表面三维微细加工的电化学湿冲压技术（EC-WETS）的上下工作模式。将Si模具上的3D微结构转移到含有15%NaNO3、2%MgF2、1%NaOH和5%甘油的琼脂糖水凝胶上，其充当用于电化学微加工的准固体电解质。然后通过阳极溶解将转移到琼脂糖凝胶上的3D微结构复制到Al表面。脉冲电位法显著提高了微加工质量，加工误差小于200 nm，Z向平均去除率为210 nm min（-1）。该方法是一种高效、低成本、绿色的金属活性表面三维微细加工方法，对微机电系统（MEMS）的制造具有重要的应用价值。(c)2013爱思唯尔有限公司版权所有。
We proposed an up-down working mode of electrochemical wet stamping technique (EC-WETS) for three dimensional (3D) micromachining on aluminum (Al) surface. 3D microstructures on a Si mold were transferred on to an agarose hydrogel containing 15% NaNO3, 2% MgF2, 1% NaOH and 5% glycerin, which acted as the quasi-solid electrolyte for the electrochemical micromachining. The transferred 3D microstructures on agarose hydrogel were then duplicated onto Al surface through anodic dissolution. The micromachining quality was improved by pulse-potential method dramatically with a machining tolerance lower than 200 nm and an average removal rate of 210 nm min(-1) in the Z direction. This method was proved to be a highly efficient low cost and green method for 3D micromachining on active metal surface, which would be valuable for the manufacture of microelectromechanical system (MEMS). (c) 2013 Elsevier B.V. All rights reserved.