Neutron Reflectometry Tomography for Imaging and Depth Structure Analysis of Thin Films with In-Plane Inhomogeneity
Neutron Reflectometry Tomography for Imaging and Depth Structure Analysis of Thin Films with In-Plane Inhomogeneity
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DOI：
10.1021/acs.langmuir.0c02744
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发表时间：
2021-01-12
期刊：
影响因子：
3.9
通讯作者：
Takenaka, Mikihito
中科院分区：
文献类型：
--
作者：
Aoki, Hiroyuki;Ogawa, Hiroki;Takenaka, Mikihito
中子反射计（NR）已被用于材料表面和界面处的深度结构分析，具有亚纳米分辨率。传统的NR提供大于几平方厘米的面积的平均信息;因此，它不能应用于具有面内不均匀性的界面。本研究实现了聚合物薄膜面内结构的NR成像。通过片状中子束获得的空间分辨NR剖面的断层重建提供了平面内界面形态的二维图像。中子散射长度密度的深度分布通过分析小于0.1 mm的局部区域的位置相关NR轮廓来获得（2）。当前的NR层析成像方法能够对具有非均匀结构的界面进行NR测量。它还提供了各种材料表面和界面附近原子组成的三维分布信息。
Neutron reflectometry (NR) has been used for the depth structure analysis of materials at the surface and interface with a sub-nanometric resolution. Conventional NR provides averaged information for an area larger than several square centimeters; therefore, it cannot be applied to an interface with an in-plane inhomogeneity. In this study, the NR imaging of the in-plane structure of polymer thin films was achieved. The tomographic reconstruction of the spatially resolved NR profiles obtained by a sheet-shaped neutron beam provided a two-dimensional image of the in-plane interface morphology. The depth distribution of the neutron scattering length density was obtained by analyzing the position-dependent NR profile at a local area less than 0.1 mm(2). The current NR tomography method enables NR measurements for an interface with an inhomogeneous structure. It also provides information on the three-dimensional distribution of the atomic composition near the surface and interfaces for various materials.