Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement
Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement
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DOI：
10.3390/mi11040362
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发表时间：
2020-04-01
期刊：
影响因子：
3.4
通讯作者：
Taguchi, Yoshihiro
中科院分区：
文献类型：
--
作者：
Hashimoto, Masaaki;Taguchi, Yoshihiro
Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibility and potential of a kirigami-inspired electrothermal MEMS scanner, which achieves large vertical displacement by out-of-plane film actuation. The proposed scanner is composed of film materials suitable for electrothermal self-reconfigurable folding and unfolding, and microscale film cuttings are strategically placed to generate large displacement. The freestanding electrothermal kirigami film with a 2 mm diameter and high fill factor is completely fabricated by careful stress control in the MEMS process. A 200 mu m vertical displacement with 131 mW and a 20 Hz responsive frequency is experimentally demonstrated as a unique function of electrothermal kirigami film. The proposed design, fabrication process, and experimental test validate the proposed scanner's feasibility and potential for large-displacement scanning with a high fill factor.
