Preparation of diamond-shaped channels in SU-8 for optical control of the filling state

Preparation of diamond-shaped channels in SU-8 for optical control of the filling state
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SU-8 中菱形通道的制备用于光学控制填充状态

DOI:
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发表时间:
2009
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通讯作者:
K. Zimmer
K. Zimmer
中科院分区:
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文献类型:
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作者:
S. Möllenbeck;N. Bogdanski;A. Mayer;H. Scheer;J. Zajadacz;K. Zimmer

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为了改善在用所研究的流体填充微流体装置的通道期间的控制,提出了一种新的概念:具有菱形横截面的通道。这些通道很容易让人们区分一个未填充的通道从一个填充的通道,通过简单的光学显微镜。这个想法是基于这样一个事实,即入射光被完全反射与未填充的通道,而它主要是通过填充的通道。在玻璃上的薄SU-8层中制备这样的通道是通过具有底切沟槽的Si模板的双重复制来进行的。功能测试与填充材料跨越典型的有机介质的折射率范围提供了一个良好的对比度之间的填充和未填充的通道,从而证明了这一概念的能力。
To improve control during the filling of the channels of a microfluidic device with the fluid under investigation, a new concept is presented: channels with a diamond-shaped cross section. These channels easily allow one to distinguish an unfilled channel from a filled channel by simple optical microscopy. The idea is based on the fact that incident light is totally reflected with unfilled channels, whereas it is mostly transmitted with filled channels. Preparation of such channels in thin SU-8 layers on a glass was performed via a double replication of a Si template with undercut trenches. Functionality tests with filling materials spanning the range of refractive indices of typical organic media provided an excellent contrast between filled and unfilled channels, thus demonstrating the capacity of this concept.