Polymer Magnetic Composite Core Boosts Performance of Three-Dimensional Micromachined Inductive Contactless Suspension
Polymer Magnetic Composite Core Boosts Performance of Three-Dimensional Micromachined Inductive Contactless Suspension
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DOI：
10.1109/lmag.2016.2612181
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发表时间：
2016-09
影响因子：
1.2
通讯作者：
K. Poletkin;Zhiqiu Lu;A. Moazenzadeh;S. Mariappan;J. Korvink;U. Wallrabe;V. Badilita
中科院分区：
文献类型：
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作者：
K. Poletkin;Zhiqiu Lu;A. Moazenzadeh;S. Mariappan;J. Korvink;U. Wallrabe;V. Badilita
我们介绍了一种新开发的聚合物磁性复合材料，用作高电阻率，高磁导率磁芯，显着改善微机械感应悬浮的能耗。与没有芯的类似感应悬浮结构相比，获得110 μm悬浮高度所需的电流为65 mA，而不是120 mA。核心的使用使环境空气中的工作温度从27 °C从120 °C降至60 °C，这是所有先前报道的微机械感应悬浮液中的最低值。除了这种性能的改善，目前的贡献表明了三维微机械感应悬浮作为悬浮微机械系统的集成元件的可行性。
We introduce a newly developed polymer magnetic composite for use as a high resistivity, high permeability magnetic core to significantly improve the energy consumption of micromachined inductive suspensions. Compared to a similar inductive suspension structure without a core, the electrical current required to obtain a levitation height of 110 μm is 65 mA versus 120 mA. The use of the core brings the operating temperature in ambient air at 27 °C down from 120 °C to 60 °C, the lowest value among all previously reported micromachined inductive suspensions. Beyond this performance improvement, the present contribution demonstrates the feasibility of three-dimensional micromachined inductive suspensions as integrated elements of levitated micromachined systems.