Three-dimensional Particle-In-Cell simulation of ion characteristics in anode layer ion source
Three-dimensional Particle-In-Cell simulation of ion characteristics in anode layer ion source
复制标题
阳极层离子源离子特性的三维Particle-In-Cell模拟
DOI：
10.1016/j.surfcoat.2018.08.059
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发表时间：
2019-05
影响因子：
5.4
通讯作者：
Tang Deli
中科院分区：
文献类型：
--
作者：
Li Pingchuan;Zhang Fan;Geng Shaofei;Zhao Jie;Tang Deli
对出口直径为80 mm（D80）的圆柱形阳极层离子源（ALIS）的离子特性进行了实验研究。大电流低电压模式下的离子束流高于小电流高电压模式下的离子束流，束流发散角达到42°。采用三维粒子模拟方法（PIC MCC）对不同工作条件下的离子特性进行了数值模拟。模拟结果表明，放电电压主要影响离子密度分布、离子能量和离子发散角，从而导致离子的形成和运动。约52%的离子发散角在30° ~ 45°之间，同时这种离子源具有较宽的离子能量分布范围，有利于应用。因此，根据具体工艺，保持较大的离子发散角和集中的离子能量分布的平衡，选择合适的工作气压是提高加工效果的关键。
Ion characteristics in cylindrical anode layer ion source (ALIS) with an outlet diameter of 80 mm (D80) are experimentally investigated. The ion beam current in the high-current and low-voltage mode is higher than that in the low-current and high-voltage mode and divergence half angle of ion beam is up to 42°. Numerical simulation by three-dimensional Particle-In-Cell with Monte Carlo collisions method (PIC-MCC) is performed to demonstrate the ion characteristics in different operational conditions. The simulation results reveal that ion density distribution and ion energy and ion divergence half-angle is mainly affected by discharge voltage which induce the formation and movement of ions. About 52% ions have divergence half-angle range from 30°to 45°, meanwhile this kind of ion source has a wide range of ion energy distribution which is helpful for application. Therefore, according to specific process, keeping the balance of a relatively large ion divergence angle and a concentrated ion energy distribution and choosing a proper working gas pressure is the key to improve the processing effect.
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影响因子：
2.2
作者：
S. Geng;X. Qiu;Chin-min Cheng;P. Chu;D. Tang
通讯作者：
S. Geng;X. Qiu;Chin-min Cheng;P. Chu;D. Tang
影响因子：
2.2
作者：
D. Tang;S. Geng;X. Qiu;P. Chu
通讯作者：
D. Tang;S. Geng;X. Qiu;P. Chu
影响因子：
2.2
作者：
A. Ducrocq;J. Adam;A. Héron;G. Laval
通讯作者：
A. Ducrocq;J. Adam;A. Héron;G. Laval
影响因子：
3.2
作者：
Y. Choi;I. Boyd;M. Keidar
通讯作者：
Y. Choi;I. Boyd;M. Keidar
影响因子：
6.3
作者：
V. Vahedi;M. Surendra
通讯作者：
V. Vahedi;M. Surendra