The Effects of Dopants on the Chemistry and Tribology of Sputter-Deposited MoS2 Films
The Effects of Dopants on the Chemistry and Tribology of Sputter-Deposited MoS2 Films
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DOI：
10.1080/10402009508983486
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发表时间：
1995
影响因子：
2.1
通讯作者：
J. Zabinski;M. Donley;S. Walck;T. Schneider;N. T. McDevitt
中科院分区：
文献类型：
--
作者：
J. Zabinski;M. Donley;S. Walck;T. Schneider;N. T. McDevitt
事实。掺杂剂改善溅射MoS 2膜的摩擦和磨损性能是众所周知的。然而，掺杂剂在摩擦和磨损机制中的作用还没有得到很好的理解。这项工作的目的是通过共沉积一些材料，即，Ni、Fe、Au和. Sb 2 O3，与MoS 2和评价其对膜化学，结晶度，微观结构和摩擦学的影响。摩擦和磨损的测量，收集使用球对平和双擦鞋tribome-eters。其他物理和化学性质通过SEM、XPS、XRD和拉曼光谱获得。在所有的膜中均观察到结晶MoS 2。在Sb 2 O3掺杂的薄膜中，还观察到非晶相。掺杂剂的存在引起膜致密化和影响微晶尺寸。它们对整体微晶取向几乎没有影响。此外，掺杂剂引起的平均值和减少。摩擦系数的变化和磨损的增加。
The fact. that dopants improve the friction and wear properties of sputtered MoS2 films is well known. However, the role of dopants in the mechanisms governing friction and wear are not well understood. The purpose of this work is to gain a fundamental understanding of their role by co-depositing a number of materials, i.e., Ni, Fe, Au, and. Sb2O3, with MoS2 and evaluating their effects on film chemistry, crystallinity, microstructure, and tribology. Friction and wear measurements were collected, using ball-on-flat and dual-rub shoe tribom-eters. Other physical and chemical properties were obtained using SEM, XPS, XRD) and Raman spectroscopy. Crystalline MoS2 was seen in all of the films. In Sb2O3-doped films, an amorphous phase was also observed. The presence of dopants caused film densification and affected crystallite size. They had little effect on the overall crystallite orientation. In addition, dopants caused a reduction in the mean and. variance of the friction coefficient and an increase in wear ...