Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film
Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film
复制标题
使用聚酰亚胺薄膜上的立式悬臂梁的多轴触觉传感器
DOI：
10.1109/mems51670.2022.9699747
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
Hidetoshi Takahashi
中科院分区：
文献类型：
--
作者：
Rihachiro Nakashima;Hidetoshi Takahashi
本文报道了一种使用直立激光诱导石墨烯（LIG）悬臂梁的多轴触觉传感器。所提出的传感器元件的制造过程仅涉及两种类型的激光中的每一种的一次照射。此外，由于LIG悬臂形成在柔性聚酰亚胺（PI）薄膜上，因此悬臂可以通过热塑变形轻松保持在直立位置。结果，原型双轴传感器实现了高度独立的法向应力和剪切应力的测量。
This paper reports a multi-axial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The fabrication process of the proposed sensor element involves only one irradiating of each of the two types of lasers. Additionally, since the LIG cantilevers are formed on a flexible polyimide (PI) film, the cantilever can be easily kept in a standing position via thermoplastic deformation. As a result, the prototype dual axial sensor realized the measurement of normal and shear stresses with high independence.