Uncertainty Analysis Method Including Influence of Probe Alignment on On-Wafer Calibration Process
Uncertainty Analysis Method Including Influence of Probe Alignment on On-Wafer Calibration Process
复制标题
不确定性分析方法，包括探针对准对晶圆校准过程的影响
DOI：
10.1109/tim.2019.2907733
复制
发表时间：
2019
影响因子：
5.6
通讯作者：
M. Horibe
中科院分区：
文献类型：
--
作者：
R. Sakamaki;M. Horibe
本文介绍了一种不确定度分析方法，包括详细分析的贡献，探头对准在<inline-formula><tex-math notation="LaTeX">$X$</tex-math></inline-formula>-，<inline-formula><tex-math notation="LaTeX">$Y$</tex-math></inline-formula>-，和<inline-formula><tex-math notation="LaTeX">$Z$</tex-math></inline-formula>-坐标，倾斜角，旋转角。每个贡献者的贡献进行了分析，通过蒙特卡罗计算与多线穿透反射线（mTRL）校准算法。每个探头位置的贡献是分开使用的精密探测技术与全自动探针台。发现直通标准品和线标准品对校准重现性的影响大于反射标准品。此外，探针之间的距离被认为是最主要的不确定性因素。这些结果可以用传统的矢量分析系统理论来解释。最后，不确定度估计与传统的手工探测和精密探测技术的分析算法。分析结果表明，精密测头技术通过减小测头位置的变化，显著降低了测量不确定度，为精密测头技术提高测量再现性提供了佐证。
This paper describes an uncertainty analysis method, including a detailed analysis of the contributions of probe alignment in the <inline-formula> <tex-math notation="LaTeX">$X$ </tex-math></inline-formula>-, <inline-formula> <tex-math notation="LaTeX">$Y$ </tex-math></inline-formula>-, and <inline-formula> <tex-math notation="LaTeX">$Z$ </tex-math></inline-formula>-coordinates, tilt angle, and rotation angle. The contribution of each contributor was analyzed through the Monte Carlo calculation with a multiline thru–reflect–line (mTRL) calibration algorithm. The contribution of each probe position was separated using a precision probing technique with a fully automatic probe station. Thru and line standards were found to have a larger impact on calibration reproducibility than the reflect standard. Furthermore, the distance between probes was found to be the most dominant uncertainty contributor. These results can be explained by the conventional vector analyzer system theories. Finally, uncertainties were estimated with the conventional manual probing and precision probing technique by the developed analysis algorithm. The analysis result shows that the precision probing technique significantly decreased uncertainty by reducing variations in probe positions, which provides the corroborative evidence of the improvement of measurement reproducibility by the precision probing technique.