Improvement of GaN Quality by Maskless Epitaxy of Lateral Overgrowth on 3C-SiC/Si substrates
Improvement of GaN Quality by Maskless Epitaxy of Lateral Overgrowth on 3C-SiC/Si substrates
复制标题
通过 3C-SiC/Si 衬底上横向过度生长的无掩模外延提高 GaN 质量
DOI:
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发表时间:
2012
期刊:
影响因子:
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通讯作者:
H Oku
中科院分区:
文献类型:
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作者:
H Fang;Y Takaya;H Miyake;K Hiramatsu;H Asamura;K Kawamura;H Oku