Multiple replication of three dimensional structures with undercuts
Multiple replication of three dimensional structures with undercuts
复制标题
带底切的三维结构的多重复制
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
K. Zimmer
中科院分区：
文献类型：
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作者：
S. Möllenbeck;N. Bogdanski;M. Wissen;H. Scheer;J. Zajadacz;K. Zimmer
在第一步骤中，在弹性材料中复制具有不同大小的确定底切的三维线性结构，在第二复制步骤中，在负色调抗蚀剂中复制。第一步采用激光烧蚀和各向异性湿法腐蚀的方法制备衬底母版。对于第二步，以反向下切为特征的弹性复制品充当母版。第一次复制是通过模压或压印进行的，其中弹性体的预聚体分别在烘箱或热压机中在母材内交联化。通过模塑成功地将底切弹性体结构复制到负色调抗蚀剂中。将硅母片与第二次复制进行比较，发现了收缩引起的差异。成功复制了高达总图案宽度60%的底切。
Three dimensional linear structures with definite undercuts of different sizes were replicated in the first step in an elastomeric material and, in the second replication step, in a negative tone resist. Undercut masters for the first step were prepared from Si by laser ablation and anisotropic wet etching. For the second step the elastomeric replica, featuring the inverse undercut, served as a master. The first replication was performed by molding or imprinting, where the prepolymer of the elastomer was cross-linked within the master in an oven or in a thermal press, respectively. The second replication of the undercut elastomeric structures into the negative tone resist was performed successfully by molding. Comparison of the Si masters with the second replication revealed shrinkage-induced differences. Undercuts of up to 60% of the overall pattern width were successfully replicated.