Improvement of X-ray reflectivity calculation on surface and interface roughness
Improvement of X-ray reflectivity calculation on surface and interface roughness
复制标题
表面和界面粗糙度的 X 射线反射率计算的改进
DOI：
10.7567/jjap.53.05fh06
复制
发表时间：
2014
影响因子：
1.5
通讯作者：
Y. Fujii
中科院分区：
文献类型：
--
作者：
Y. Fujii
在用于估计多层表面的传统X射线反射率（XRR）分析中，反射率是基于Parratt形式计算的，并通过Nevot-Croce理论考虑了粗糙度的影响。然而，由于方程中没有考虑粗糙界面处的漫散射，计算结果经常表现出奇怪的行为。然后我们开发了新的改进的形式主义来纠正这个错误。在这项研究中，我们展示了使用透射电子显微镜（TEM）观察结果的新改进形式的应用。使用常规XRR公式得到的界面粗糙度结果与TEM结果存在较大差异，并得出错误的表面结构。然而，新改进的形式主义的结果很好地再现了TEM结果，但需要适当的透射系数参数。结果表明，新改进的 XRR 形式可以对 XRR 进行更准确的分析，但反射率方程中具有物理依据的菲涅尔系数降低还需要进一步研究。
In the conventional X-ray reflectivity (XRR) analysis for the estimation of multilayer surface, the reflectivity is calculated based on the Parratt formalism, accounting for the effect of roughness by the theory of Nevot-Croce. However, the calculated results have shown often strange behaviour due to the fact that the diffuse scattering at the rough interface was not taken into account in the equation. Then we developed new improved formalism to correct this mistake. In this study, we show applying of new improved formalism using a transmission electron microscope (TEM) observation result. The result of interfacial roughness by using the conventional XRR formulae showed large difference with the TEM result, and derived wrong structure of surface. While, the result by new improved formalism reproduce the TEM result well, but need appropriate parameters in transmission coefficient. It shows that new improved XRR formalism derives more accurate analysis of the XRR, but the reduced Fresnel coefficients with physical grounds in the reflectivity equation are need in further research.