Quasistatic Plasma Sources : Physical Principles, Modelling Experiments, Application Aspects
Quasistatic Plasma Sources : Physical Principles, Modelling Experiments, Application Aspects
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准静态等离子体源：物理原理、建模实验、应用方面
DOI：
10.1051/jp4:1997430
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
A. Rukhadze
中科院分区：
文献类型：
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作者：
K. Shamrai;A. Aleksandrov;G. Bougrov;V. F. Virko;V. P. Katiukha;S. Koh;E. Kralkina;G. Kirichenko;A. Rukhadze
对框架型天线激发的磁场增强射频等离子体源（准静态等离子体源）进行了理论和实验处理。理论模型预测，射频功率的很大一部分会通过准静电波的激发而被源等离子体吸收。获得了吸收对等离子体密度、外部磁场、驱动频率和源尺寸（比例定律）的依赖性。在预制致密等离子体中吸收低功率射频信号的特殊实验很好地证实了这一理论。不同源的测试实验结果表明，准静态源的放电行为与理论预测非常吻合。利用这些知识，设计并优化了紧凑型低功率离子源。对其参数的详细测试表明，该装置作为离子推进器以及各种材料加工应用具有良好的前景。
Magnetic field enhanced rf plasma sources excited by frame-type antennas (quasistatic plasma sources) are treated theoretically and experimentally. The theoretical model predicts that a significant part of the rf power is absorbed in a source plasma via the excitation of quasi-electrostatic waves. The dependences of absorption on plasma density, extemal magnetic field, driving frequency, and source dimensions (scaling laws) are obtained. Special experiments on low-power rf signal absorption in a preformed dense plasma corroborate well the theory. Results of test experiments with different sources have shown that a behaviour of the discharge in quasistatic sources is in good agreement with theoretical predictions. Using this knowledge, a compact low-power ion source was designed and optimized. Detailed testing of its parameters has shown that this device has good prospects for use as an ion thruster, and for various materials processing applications.