Laser induced deposition of zinc oxide
Laser induced deposition of zinc oxide
复制标题
激光诱导氧化锌沉积
DOI：
10.1063/1.94064
复制
发表时间：
1983
影响因子：
4
通讯作者：
G. Collins
中科院分区：
文献类型：
--
作者：
R. Solanki;G. Collins
我们用准分子激光从二甲基锌和二氧化氮中光沉积了均匀的(±5%)氧化锌薄膜。在2 cm×5 cm的面积上获得了3000A/min的沉积速率。我们测量了这些光沉积薄膜的应力、折射率、刻蚀速率、附着力、针孔密度和化学计量比。
We have used an excimer laser to photodeposit uniform (±5%) films of zinc oxide from dimethylzinc and nitrogen dioxide. Deposition rates of 3000 A/min over 2 cm×5 cm areas were obtained. We have measured the stress, refractive index, etch rate, adhesion, pinhole density, and the stoichiometry of these photodeposited films.