Optical vibration sensor fabricated by femtosecond laser micromachining
Optical vibration sensor fabricated by femtosecond laser micromachining
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DOI：
10.1063/1.2008362
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发表时间：
2005-08-01
影响因子：
4
通讯作者：
Mazur, E
中科院分区：
文献类型：
--
作者：
Kamata, M;Obara, M;Mazur, E
利用高重复频率飞秒激光振荡器制作了一种光学振动传感器。该传感器由一个单一的直波导写在一系列的三块玻璃。中心件安装在悬挂梁上，使其对机械振动、加速度或外力敏感。通过测量通过波导的光传输的变化来检测中心件的位移。由此产生的传感器体积小、结构简单，并且不需要对准。该传感器在20 Hz-2 kHz的频率范围内具有线性响应，可检测小至0.01 m/s（2）的加速度，并且几乎与温度无关。(c)2005年美国物理学会。
We fabricated an optical vibration sensor using a high-repetition rate femtosecond laser oscillator. The sensor consists of a single straight waveguide written across a series of three pieces of glass. The central piece is mounted on a suspended beam to make it sensitive to mechanical vibration, acceleration, or external forces. Displacement of the central piece is detected by measuring the change in optical transmission through the waveguide. The resulting sensor is small, simple, and requires no alignment. The sensor has a linear response over the frequency range 20 Hz-2 kHz, can detect accelerations as small as 0.01 m/s(2), and is nearly temperature independent. (c) 2005 American Institute of Physics.