Beam Diameter Reduction by Optimization of an Extraction Condition in a Compact Ion Microbeam System
Beam Diameter Reduction by Optimization of an Extraction Condition in a Compact Ion Microbeam System
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DOI：
10.1016/j.phpro.2017.09.022
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
T. Ohkubo;Y. Ishii
中科院分区：
文献类型：
--
作者：
T. Ohkubo;Y. Ishii
研制了数百keV级紧凑型质子微束系统，作为1 MeV紧凑型微束系统的原型，用于微加工和微分析。对提取条件进行了优化，使光束直径约为1 μm。测得的光束直径为1.8 μm。这表明紧凑的微束系统是一个可行的选择，以MeV级传统的大型加速器系统。
A several hundred keV class compact proton microbeam system was developed as a prototype of a 1 MeV compact microbeam system to be used in micro-fabrication and micro-analyses. Optimization of an extraction condition was performed to increase demagnification and to achieve a beam diameter of approximately 1 μm. The beam diameter measurement showed that a diameter of 1.8 μm was obtained. This indicates that the compact microbeam system is a feasible alternative to a MeV class conventional large accelerator system.