The lattice parameter of silicon: a secondary realisation of the metre
The lattice parameter of silicon: a secondary realisation of the metre
复制标题
DOI：
10.1088/1361-6501/abb2ba
复制
发表时间：
2020-12-01
影响因子：
2.4
通讯作者：
Dixson, Ron
中科院分区：
文献类型：
--
作者：
Yacoot, Andrew;Bosse, Harald;Dixson, Ron
2019年修订的国际单位制（SI）将七个基本单位与基本常数联系起来；米的定义已经与光速联系在一起，只需要稍微修改一下。然而，自1983年以来，米实现的最大变化发生在采用硅的晶格参数作为米的二次实现以支持维度纳米计量学。d（220）硅晶格间距的可追溯性已经通过结合光学和x射线干涉测量法建立起来，相对不确定度为1.67 x 10(-8)，通过硅晶格间距的可追溯性的三条路线已经在米的“实践准则”中正式认可。这些是使用x射线干涉测量法测量长度（依赖于晶格间距的已知值，而不是使用x射线干涉测量法测量晶格间距），使用透射电子显微镜对线宽结构上的原子进行计数，并使用单原子步骤校准扫描探针显微镜。本文描述了这些途径，并强调了这种新的二次实现所带来的机会。
The 2019 revision of the International System of Units (SI) linked the seven base units to fundamental constants; only a minor rewording was necessary for the metre whose definition was already linked to the speed of light. However, the largest change in the metre realisation since 1983 occurred with the adoption of the lattice parameter of silicon as a secondary realisation of the metre to support dimensional nanometrology. The traceability of the d(220) silicon lattice spacing has been established through combined optical and x-ray interferometry with a relative uncertainty of 1.67 x 10(-8) and three routes to traceability via the silicon lattice spacing have been formally recognised in the Mise en Pratique for the metre. These are length measurement using x-ray interferometry (relying on the known value for the lattice spacing rather than using x-ray interferometry to measure the lattice spacing) counting atoms on linewidth structures using transmission electron microscopy and using monoatomic steps to calibrate scanning probe microscopes. This paper describes these routes and highlights the opportunities this new secondary realisation presents.