Towards automated AFM-based nanomanipulation in a combined nanorobotic AFM/HRSEM/FIB system
Towards automated AFM-based nanomanipulation in a combined nanorobotic AFM/HRSEM/FIB system
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在纳米机器人 AFM/HRSEM/FIB 组合系统中实现基于 AFM 的自动化纳米操作
DOI：
10.1109/icma.2011.5985651
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
V. Eichhorn
中科院分区：
文献类型：
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作者：
M. Bartenwerfer;S. Fatikow;R. Tunnell;U. Mick;C. Stolle;C. Diederichs;D. Jasper;V. Eichhorn
在本文中，提出了基于 AFM 的半自动纳米操纵半径为 550 nm 的二氧化硅球。 AFM/HRSEM/FIB 组合系统用于通过触觉反馈促进基于 SEM 视觉的拾取和放置处理。描述了支持微米和纳米球自动定位的对象识别和跟踪算法。实现源样品和目标样品位置的自动对准，以支持不同基板的快速交换并加快拾取和放置过程。触觉反馈设备的集成可实现基于 AFM 的直观纳米操纵和力反馈。将二氧化硅球组装成 2×2 μm 阵列，用于红外光谱应用。
In this paper, the semi-automated AFM-based nanomanipulation of silica spheres with a radius of 550 nm is presented. A combined AFM/HRSEM/FIB system is used to facilitate the SEM vision-based pick-and-place handling with haptic feedback. Object recognition and tracking algorithms are described supporting the automated localization of micro-and nanospheres. Automated alignment of source and target sample positions is realized to support fast exchange of different substrates and to speed up the pick-and-place procedure. The integration of a haptic feedback device allows for intuitive AFM-based nanomanipulation with force feedback. The silica spheres are assembled into 2×2 μm arrays for applications in infrared spectroscopy.