Optical Fourier transform based in-plane vibration characterization for MEMS comb structure.
Optical Fourier transform based in-plane vibration characterization for MEMS comb structure.
复制标题
基于光学傅里叶变换的 MEMS 梳状结构面内振动表征。
DOI：
10.1364/oe.21.005063
复制
发表时间：
2013
期刊：
影响因子：
3.8
通讯作者：
Jianzhong Yang
中科院分区：
文献类型：
--
作者：
Yongfeng Gao;Liangcai Cao;Z. You;Jiahao Zhao;Zichen Zhang;Jianzhong Yang
微机电系统（MEMS）机械性能的在线和在片有效表征对MEMS代工厂的大规模生产具有重要意义。然而，挑战依然存在。本文提出了一种基于光学傅里叶变换的MEMS梳齿面内振动特性分析方法。在实验中，在焦平面上的光强分布被捕获来表征MEMS梳状结构中的振动器的位移。对一个典型的MEMS梳进行了测试，以验证其原理。利用空间光调制器（SLM）对MEMS梳齿的形状和运动进行了模拟和测试，并对测量结果进行了校准。测量位移的相对标准偏差（RSD）优于5%，其中RSD定义为标准偏差与平均值的比值。实验结果表明，该方法具有方便、高效、低成本等优点，可用于MEMS器件的在线和在片表征。
On-line and on-wafer characterizations of mechanical properties of Micro-Electro-Mechanical-System (MEMS) with efficiency are very important to the mass production of MEMS foundry in the near future. However, challenges still remain. In this paper, we present an in-plane vibration characterizing method for MEMS comb using optical Fourier transform (OFT). In the experiment, the intensity distribution at the focal plane was captured to characterize the displacement of the vibrator in the MEMS comb structure. A typical MEMS comb was tested to verify the principle. The shape and the movement of MEMS comb was imitated and tested to calibrate the measurement by using a spatial light modulator (SLM). The relative standard deviations (RSD) of the measured displacements were better than 5%, where the RSD is defined as the ratio of the standard deviation to the mean. It is convinced that the presented method is feasible for on-line and on-wafer characterizations for MEMS with great convenience, high efficiency and low cost.