Development of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph
Development of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph
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DOI：
10.1143/jjap.51.07gc24
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发表时间：
2012-07
影响因子：
1.5
通讯作者：
T. Iwaya;S. Akao;Toshihiro Sakamoto;T. Tsuji;N. Nakaso;K. Yamanaka
中科院分区：
文献类型：
--
作者：
T. Iwaya;S. Akao;Toshihiro Sakamoto;T. Tsuji;N. Nakaso;K. Yamanaka
在环境测量和安全领域，需要一台便携式气相色谱仪(GC)对多种有害气体进行现场分析。尽管气体分离柱已经使用微电子机械系统(MEMS)技术缩小了尺寸，但对于便携式GC来说，由硅和玻璃制成的MEMS柱仍然没有足够的坚固性和足够低的制造成本。在这项研究中，我们将扩散键合腐蚀不锈钢板与声学显微镜的对准评估相结合，制造了一种坚固而廉价的高精度金属MEMS柱。使用带有火焰离子化检测器的台式GC对其分离性能进行了评估，我们获得了与采用动态涂层方法制备的最好的硅MEMS柱相当的高分离性能。作为应用，我们制作了手掌大小的表面声波(SAW)GC，并将该柱与圆锯传感器相结合，成功地分离和检测了挥发性有机化合物的混合物。
In the field of environmental measurement and security, a portable gas chromatograph (GC) is required for the on-site analysis of multiple hazardous gases. Although the gas separation column has been downsized using micro-electro-mechanical-systems (MEMS) technology, an MEMS column made of silicon and glass still does not have sufficient robustness and a sufficiently low fabrication cost for a portable GC. In this study, we fabricated a robust and inexpensive high-precision metal MEMS column by combining diffusion-bonded etched stainless-steel plates with alignment evaluation using acoustic microscopy. The separation performance was evaluated using a desktop GC with a flame ionization detector and we achieved the high separation performance comparable to the best silicon MEMS column fabricated using a dynamic coating method. As an application, we fabricated a palm-size surface acoustic wave (SAW) GC combining this column with a ball SAW sensor and succeeded in separating and detecting a mixture of volatile organic compounds.