Growth and electrical properties of 3C-SiC/nanocrystalline diamond layered films
Growth and electrical properties of 3C-SiC/nanocrystalline diamond layered films
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3C-SiC/纳米晶金刚石层状薄膜的生长和电学性能
DOI:
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发表时间:
2011
期刊:
影响因子:
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通讯作者:
and Yoshimine KATO
中科院分区:
文献类型:
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作者:
Akira KOGA;Kungen TEII;Masaki GOTO;Kazuhiro YAMADA;and Yoshimine KATO