Fabrication of Al Microspheres by Utilizing Electromigration
Fabrication of Al Microspheres by Utilizing Electromigration
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DOI：
10.1166/jnn.2009.444
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发表时间：
2009-03-01
影响因子：
--
通讯作者：
Saka, Masumi
中科院分区：
文献类型：
--
作者：
Sun, Yuxin;Tohmyoh, Hironori;Saka, Masumi
利用电迁移法制备了直径为4 ~ 7 μ m的铝微球。在阳极端有狭缝的钝化铝线中，由于高电流密度和高衬底温度而在狭缝前积累的原子从钝化层中预先引入的孔中释放出来，并借助于表面张力形成微球。球体在铝线阳极端特定温度范围内形成。
Aluminum microspheres with diameters of 4-7 mu m have been fabricated by utilizing electromigration. In a passivated Al line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific range of the temperature at the anode end of Al line.